Operating Conditions
- Apply Temperature: 80°C
- Apply Humidity: 100%RH (No Dew)
Qualified With
- Std. EN 1822 Class U15 / U16 / U17
- Std. ENS RP-CC-001.3 TYPE F
With Standard Capacity ULPA Filter:
| Filter Unit Model |
Dimension |
Filter Model |
Dimension |
Capacity |
Initial P.D. |
(*without inlet duct)
Length * Width * Depth |
(*without gasket)
Length * Width * Depth |
| FB-C10600250 |
1210×600×180 mm |
U5MHB70560070 |
1170×560×70 mm |
20.2 CMM |
17 mmH2O
（167 Pa） |
| FB-B70570250 |
1170×570×180 mm |
U5MHB30530070 |
1130×530×70 mm |
18.3 CMM |
| FB-905600250 |
905×600×180 mm |
U5MH865560070 |
865×560×70 mm |
14.8 CMM |
| FB-870570250 |
870×570×180 mm |
U5MH830530070 |
830×530×70 mm |
13.3 CMM |
| FB-600600250 |
600×600×180 mm |
U5MH560560070 |
560×560×70 mm |
9.4 CMM |
| FB-570570250 |
570×570×180 mm |
U5MH530530070 |
530×530×70 mm |
8.3 CMM |
With High Capacity ULPA Filter:
| Filter Unit Model |
Dimension |
Filter Model |
Dimension |
Capacity |
Initial P.D. |
(*without inlet duct)
Length * Width * Depth |
(*without gasket)
Length * Width * Depth |
| FB-C10600250 |
1210×600×180 mm |
U5MHB70560070 |
1170×560×70 mm |
34.3 CMM |
25.4 mmH2O
（249 Pa） |
| FB-B70570250 |
1170×570×180 mm |
U5MHB30530070 |
1130×530×70 mm |
31.2 CMM |
| FB-905600250 |
905×600×180 mm |
U5MH865560070 |
865×560×70 mm |
25.1 CMM |
| FB-870570250 |
870×570×180 mm |
U5MH830530070 |
830×530×70 mm |
22.7 CMM |
| FB-600600250 |
600×600×180 mm |
U5MH560560070 |
560×560×70 mm |
15.9 CMM |
| FB-570570250 |
570×570×180 mm |
U5MH530530070 |
530×530×70 mm |
14.2 CMM |
*Standard diameter of inlet duct are 14"Φ(350mm),12"Φ(300mm) and 10"Φ(250mm)
Structural Drawing
